Mr. Wai Kin Li Profile

Wai Kin Li

at IBM Thomas J Watson Research Ctr

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Publications (1)

Proceedings Article | 27 April 2023 Presentation + Paper

Overlay performance in permanent bonded wafer integration schemes

Nathan Ip, Michael Belyansky, Christopher Netzband, Norifumi Kohama, Richard Johnson, Shobha Hosadurga, Jack Wong, John Arnold, Kisik Choi, Wai Kin Li, Indira Seshadri, Luciana Meli, Ilseok Son

Proceedings Volume 12496, 1249618 (2023) https://doi.org/10.1117/12.2654679

KEYWORDS: Wafer bonding, Semiconducting wafers, Distortion, Overlay metrology, Metrology, Scanners, Optical alignment, Silicon, Interfaces, Data modeling

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