Dr. Wai Yip Kwok
Applications Engineer at Synopsys
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 25 September 2010 Paper
Proc. SPIE. 7823, Photomask Technology 2010
KEYWORDS: Electron beams, Backscatter, Etching, Manufacturing, Inspection, Image quality, Photomasks, SRAF, Line edge roughness, Laser phosphor displays

Proceedings Article | 7 March 2008 Paper
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Electron beam lithography, Optical lithography, Etching, Glasses, Image resolution, Chromium, 3D modeling, Photomasks, Semiconducting wafers, Defect inspection

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