Dr. Walan C. Grizolli
Scientist, EUV Optics at KLA Corp
SPIE Involvement:
Author
Area of Expertise:
X-ray optics , Ray tracing simulations , Instrumentation for synchrotron radiation beamlines , Wavefront propagation
Publications (6)

Proceedings Article | 9 September 2019 Presentation + Paper
Proceedings Volume 11109, 111090C (2019) https://doi.org/10.1117/12.2530817
KEYWORDS: Mirrors, Wavefronts, Wavefront sensors, Sensors, X-rays, Optical alignment, Monochromatic aberrations, Hard x-rays, Diffraction, Crystals, Adaptive optics

Proceedings Article | 9 September 2019 Presentation + Paper
Proceedings Volume 11109, 111090K (2019) https://doi.org/10.1117/12.2529886
KEYWORDS: Lenses, Interferometry, Near field optics, Data analysis, Wavefronts, Metrology, X-ray optics, Data acquisition, X-rays, Beryllium

Proceedings Article | 9 September 2019 Presentation
Sergey Antipov, Sergey Kuzikov, Xianbo Shi, Walan Grizolli, Lahsen Assoufid
Proceedings Volume 11108, 111080T (2019) https://doi.org/10.1117/12.2526873
KEYWORDS: X-rays, Metrology, Diamond, X-ray optics, Laser metrology, Microfabrication, Optics manufacturing, X-ray technology, Optical design, Mirrors

Proceedings Article | 9 September 2019 Presentation
Proceedings Volume 11108, 111080R (2019) https://doi.org/10.1117/12.2526869
KEYWORDS: Diamond, X-rays, Free electron lasers, Light sources, X-ray diffraction, X-ray optics, Optical components, Laser cutting, Polishing, Surface roughness

Proceedings Article | 7 September 2017 Paper
Proceedings Volume 10385, 1038502 (2017) https://doi.org/10.1117/12.2274023
KEYWORDS: Metrology, X-rays, Wavefront sensors, Interferometry, Wavefronts, X-ray imaging, Interferometers, Near field, Speckle, Phase contrast

Showing 5 of 6 publications
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