Dr. Walter D. Gillespie
Senior Scientist at Cymer LLC
SPIE Involvement:
Publications (7)

Proceedings Article | 21 March 2018 Paper
Yzzer Roman, Ted Cacouris, Kumar Raja Guvindan Raju, Dinesh Kanawade, Walt Gillespie, Siqi Luo, Eric Mason, David Manley, Saptaparna Das
Proceedings Volume 10587, 1058716 (2018) https://doi.org/10.1117/12.2299387
KEYWORDS: Light sources, Neon, Deep ultraviolet, Carbon, Metals, Semiconducting wafers, Helium, Semiconductors, Nitrogen

Proceedings Article | 20 June 2017 Paper
Yzzer Roman, Dinesh Kanawade, Walt Gillespie, Siqi Luo, Mark Thever, Thomas Duffey, Kevin O'Brien, Rahul Ahlawat, Andrei Dorobantu, Eric Gross, Eric Mason
Proceedings Volume 10147, 101471Y (2017) https://doi.org/10.1117/12.2260307

Proceedings Article | 26 March 2015 Paper
Eric Gross, G. Padmabandu, Richard Ujazdowski, Don Haran, Matt Lake, Eric Mason, Walter Gillespie
Proceedings Volume 9426, 942626 (2015) https://doi.org/10.1117/12.2086283
KEYWORDS: Helium, Molybdenum, Nitrogen, Optical lithography, Light sources, Oscillators, Photoacoustic tomography, Field emission displays, Energy efficiency, Manufacturing

Proceedings Article | 15 March 2006 Paper
Fedor Trintchouk, Toshihiko Ishihara, Walter Gillespie, Richard Ness, Robert Bergstedt, Christian Wittak, Richard Perkins
Proceedings Volume 6154, 615423 (2006) https://doi.org/10.1117/12.658723
KEYWORDS: Light sources, Metrology, Spectroscopy, Scanners, Polarization, Immersion lithography, Acoustics, Manufacturing, Control systems, Pulsed laser operation

Proceedings Article | 12 May 2005 Paper
Toshihiko Ishihara, Robert Rafac, Wayne Dunstan, Fedor Trintchouk, Christian Wittak, Richard Perkins, Robert Bergstedt, Walter Gillespie
Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.600075
KEYWORDS: Gas lasers, Pulsed laser operation, Polarization, Molybdenum, Light sources, Spectroscopy, Immersion lithography, Fluorine, Birefringence, Beam controllers

Showing 5 of 7 publications
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