Dr. Walter Liu
at EMD Performance Materials Corp
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 15 April 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Lithography, Etching, Polymers, Coating, Reflectivity, Scanning electron microscopy, Chromophores, Immersion lithography, Semiconducting wafers, Bottom antireflective coatings

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