Dr. Walter Smetana
at Technische Univ Wien
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 22 January 2007
Proc. SPIE. 6465, Microfluidics, BioMEMS, and Medical Microsystems V
KEYWORDS: Multilayers, Microfluidics, Lenses, Sensors, Glasses, Copper, Ceramics, Fluorescence spectroscopy, Reliability, Liquids

Proceedings Article | 6 January 2006
Proc. SPIE. 6111, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V
KEYWORDS: Microelectromechanical systems, Optical fibers, Metals, Glasses, Ceramics, Numerical simulations, Microopto electromechanical systems, Finite element methods, Adhesives, Temperature metrology

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