Dr. Wan-Soo Kim
at Qoniac GmbH
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV
KEYWORDS: Process control, Finite element methods, Semiconducting wafers, Optical lithography, Semiconductors, Scanners, Logic, High volume manufacturing, Extreme ultraviolet lithography

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11327, Optical Microlithography XXXIII
KEYWORDS: Semiconducting wafers, Data modeling, Performance modeling, Overlay metrology, Computer simulations, Data corrections, Metrology, Statistical modeling, Neodymium, Statistical analysis

Proceedings Article | 26 March 2019 Paper
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Metrology, Data modeling, Statistical modeling, Critical dimension metrology, Data corrections

Proceedings Article | 13 March 2018 Paper
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Critical dimension metrology, Oxides, Capacitance, Semiconducting wafers, Etching, Metals, Resistance, Copper, Photomasks, Chemical mechanical planarization

Proceedings Article | 28 March 2017 Paper
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Critical dimension metrology, Optical lithography, Lithography, Environmental monitoring, Semiconducting wafers, Semiconductors, Etching, Photomasks, Image processing, Metrology

Showing 5 of 7 publications
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