Dr. Wan-Soo Kim
at Qoniac GmbH
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 13 March 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Oxides, Etching, Metals, Copper, Resistance, Capacitance, Photomasks, Critical dimension metrology, Semiconducting wafers, Chemical mechanical planarization

Proceedings Article | 28 March 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Semiconductors, Lithography, Metrology, Environmental monitoring, Optical lithography, Etching, Image processing, Photomasks, Critical dimension metrology, Semiconducting wafers

Proceedings Article | 28 March 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Metrology, Statistical analysis, Data modeling, Metals, Reliability, Distortion, Process control, Optical alignment, Virtual reality, Semiconducting wafers, Environmental sensing, Overlay metrology, Model-based design, Back end of line, Front end of line

Proceedings Article | 2 May 2006
Proc. SPIE. 6042, ICMIT 2005: Control Systems and Robotics
KEYWORDS: Actuators, MATLAB, Spindles, Sensors, Matrices, Magnetism, Control systems, Electromagnetism, Systems modeling, Mechatronics

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