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Wanling Pan
at imec
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Publications (1)
Proceedings Article | 16 August 2004 Paper
A surface micromachined tunable film bulk acoustic resonator
Wanling Pan, Philippe Soussan, Bart Nauwelaers, Harrie Tilmans
Proceedings Volume 5455, (2004) https://doi.org/10.1117/12.545532
KEYWORDS: Acoustics, Electrodes, Capacitors, Aluminum nitride, Resonators, Surface micromachining, Optical lithography, Etching, Fabrication, Capacitance
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