Dr. Warren Yiu-Cho Lai
SPIE Involvement:
Publications (4)

Proceedings Article | 22 January 2005
Proc. SPIE. 5719, MOEMS and Miniaturized Systems V
KEYWORDS: Actuators, Oxides, Mirrors, Electronics, Etching, Electrodes, Silicon, Adaptive optics, Deformable mirrors, Semiconducting wafers

Proceedings Article | 24 January 2004
Proc. SPIE. 5346, MOEMS and Miniaturized Systems IV
KEYWORDS: Microelectromechanical systems, Actuators, Mirrors, Electronics, Electrodes, Wavefront sensors, Wavefronts, Adaptive optics, Control systems, Deformable mirrors

Proceedings Article | 24 April 2003
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Microelectromechanical systems, Oxides, Reflectors, Mirrors, Switches, Optical fabrication equipment, Electrodes, Silicon, Microopto electromechanical systems, Semiconducting wafers

Proceedings Article | 20 January 2003
Proc. SPIE. 4983, MOEMS and Miniaturized Systems III
KEYWORDS: Microelectromechanical systems, Actuators, Lithography, Mirrors, Etching, Electrodes, Crystals, Silicon, Adaptive optics, Semiconducting wafers

Proceedings Volume Editor (2)

SPIE Conference Volume | 10 November 2005

SPIE Conference Volume | 19 January 2005

Conference Committee Involvement (2)
Nanofabrication: Technologies, Devices, and Applications II
23 October 2005 | Boston, MA, United States
Nanofabrication: Technologies, Devices, and Applications
25 October 2004 | Philadelphia, Pennsylvania, United States
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