An uncooled linear array of 66 infrared elements has been designed, simulated, and fabricated using MEMS
techniques. CMOS compatible poly-Silicon thermoelectric materials are utilized. Numerical simulations optimize the
geometry and physical parameters for the thermopile materials. The pixel dimensions are 2.0 mm x 0.45 mm with 0.5
mm pitch. Excellent performance has been obtained in Nitrogen environment: D* = 1.2 x 108 cm √Hz/W; ι = 31 ms; and
cross talk of <15%. Measured performance is comparable to, and in some respects exceeds, the performance of
thermopile linear arrays based on Bi and Sb materials. The arrays are packaged for integration with an existing
dispersive infrared spectrometer.