Dr. Wayne R. McKinney
Optical Consultant
SPIE Involvement:
Editorial Board Member: Optical Engineering | Author
Area of Expertise:
Diffraction Gratings , VUV and Soft X-ray Optics , Optical Metrology , Grazing Incidence Optical Path , Scientific Programming , Ray Tracing
Publications (54)

Proceedings Article | 18 September 2018 Paper
Proc. SPIE. 10761, Adaptive X-Ray Optics V
KEYWORDS: Mirrors, X-rays, Grazing incidence, Metrology, X-ray optics, Optimization (mathematics), Software development, Geometrical optics, Error analysis, Algorithm development

Proceedings Article | 7 September 2017 Presentation + Paper
Proc. SPIE. 10385, Advances in Metrology for X-Ray and EUV Optics VII
KEYWORDS: X-ray optics, Metrology, Interferometry, Prisms, Optical metrology, Free electron lasers, Diffraction, Synchrotrons, Coherent x-ray sources, X-ray sources

SPIE Journal Paper | 12 October 2015
OE Vol. 54 Issue 10
KEYWORDS: Metrology, X-ray optics, Control systems, Mirrors, Humidity, X-rays, Temperature metrology, Interferometry, Calibration, Particles

Proceedings Article | 1 September 2015 Paper
Proc. SPIE. 9576, Applied Advanced Optical Metrology Solutions
KEYWORDS: Modulation transfer functions, Binary data, Calibration, Spatial frequencies, Standards development, Optical microscopes, Silicon, Error analysis, Sensors, Optical fabrication

Proceedings Article | 17 September 2014 Paper
Proc. SPIE. 9206, Advances in Metrology for X-Ray and EUV Optics V
KEYWORDS: Metrology, X-ray optics, Calibration, Mirrors, Humidity, Temperature metrology, Optical testing, Interferometry, Control systems, Particles

Showing 5 of 54 publications
Proceedings Volume Editor (3)

Conference Committee Involvement (6)
Advances in Metrology for X-Ray and EUV Optics IV
12 August 2012 | San Diego, California, United States
Advances in Metrology for X-Ray and EUV Optics III
1 August 2010 | San Diego, California, United States
Advances in Metrology for X-Ray and EUV Optics II
30 August 2007 | San Diego, California, United States
Theory and Practice of Surface-Relief Diffraction Gratings: Synchrotron and Other Applications
20 July 1998 | San Diego, CA, United States
Gratings and Grating Monochromators for Synchrotron Radiation
31 July 1997 | San Diego, CA, United States
Showing 5 of 6 Conference Committees
Course Instructor
NON-SPIE: Diffraction Gratings: Manufacture, Specification, and Application
Diffraction gratings are the most important wavelength dispersing optic from the soft x-ray to the infrared. This tutorial outlines the important details about the manufacture and specification of this important optical component. Both ruled and interferometrically generated gratings are covered, emphasizing the differences and unique advantages of each type. Important applications of gratings are briefly covered at the end of the tutorial. The tutorial was presented at the SPIE Annual Meeting in San Diego in conjunction with Conference 503, "International Conference on the Application, Theory, and Fabrication of Periodic Structures, Diffraction Gratings, and Moire Phenomena II.
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