CONFERENCE PROCEEDINGS
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Wee Keong Neo
at National Univ of Singapore
SPIE Involvement:
Author
Area of Expertise:
Micro/nano-machining , freeform surfaces , fast/slow tool servo , multiple-axis ultraprecision machining
Publications (1)
Proceedings Article | 13 March 2013 Paper
Electrostatic MEMS resonating micro-polygonal scanner for circumferential endoscopic bio-imaging
Xiaojing Mu, Guangya Zhou, Hongbin Yu, Julius Ming-Lin Tsai, Wee Keong Neo, A Senthil Kumar, Fook Siong Chau
Proceedings Volume 8616, 861606 (2013) https://doi.org/10.1117/12.2003972
KEYWORDS: Microelectromechanical systems, Optical coherence tomography, Endoscopy, Surface roughness, Silicon, Scanners, Diamond, Gold, Resonators, Actuators
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