Prof. Wei-Hua Sheu Profile

Prof. Wei-Hua Sheu

at Taiwan Semicon Manufacturing Co Ltd

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Author

Publications (2)

Proceedings Article | 28 May 2004 Paper

REAPS technique for printing sub-100-nm trench using KrF lithography

Wei-Hua Sheu, Elvis Yang, Ta-Hung Yang

Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.532802

KEYWORDS: Photoresist processing, Lithography, Polymers, Resolution enhancement technologies, Printing, Optical lithography, Resist chemistry, Coating, Process control, Scanning electron microscopy

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Proceedings Article | 28 August 2003 Paper

Single photoresist and double exposure (SPADE) for 0.18-um ROM and beyond

W.-H. Sheu

Proceedings Volume 5130, (2003) https://doi.org/10.1117/12.504382

KEYWORDS: Photomasks, Semiconducting wafers, Electroluminescence, Critical dimension metrology, Photoresist processing, Double patterning technology, Coating, Optical proximity correction, Silicon, Tolerancing

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