Prof. Wei-Hua Sheu
at Taiwan Semicon Manufacturing Co Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 28 May 2004
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Lithography, Optical lithography, Polymers, Coating, Scanning electron microscopy, Printing, Process control, Photoresist processing, Resist chemistry, Resolution enhancement technologies

Proceedings Article | 28 August 2003
Proc. SPIE. 5130, Photomask and Next-Generation Lithography Mask Technology X
KEYWORDS: Silicon, Coating, Electroluminescence, Photomasks, Double patterning technology, Optical proximity correction, Critical dimension metrology, Photoresist processing, Semiconducting wafers, Tolerancing

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