Nowadays, there are many popular electronic devices consist of optical focus zooming systems. It is the trend to
minimize optical systems in portable devices. For this purpose, we used deformable mirrors in optical systems that can
make them thinner and lighter. The Ionic-Polymer Metal Composite (IPMC) is the critical component in our design of
the deformable mirror. It has good bending feature and can be driven at low voltage (less than 5 volts). The IPMC
fabrication processes contain three steps: acid clean, initial compositing process and surface electrode plating process.
After the IPMC is completed, we coated the PDMS on the surface to improve the surface roughness. Then we deposit
silver on one side as a reflective surface to finish our deformable mirror.
Some characteristics of the IPMC deformable mirror would be demonstrated in the paper. By coating the PDMS on the
IPMC surface, the surface roughness can be reduced to about 20 nm. The reflection of the silver layer is up to 90%. In
our design, we make the reflective optical zoom module which consists of three biconic mirrors and two deformable
mirrors. When we applied voltages on deformable mirrors, the reflective light is successfully focused after the
deformation of elliptic IPMC. The zoom ratio of this module can be expected to 1.8 times. The deformable mirror can be
changed from flat to 65 diopters (m-1) by about 3 volts.