Wei Chen
at
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 6, 2015
Proc. SPIE. 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation
KEYWORDS: Sensors, Scanners, Error analysis, Manufacturing, Clouds, Atomic force microscopy, Profiling, Motion measurement, Spherical lenses, Scanning tunneling microscopy

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