Integrated quantum photonics relies critically on photon sources that have great purity, single-mode property, scalability, integrability and flexibility for both integrated quantum computing and long-haul quantum communication. Here we report a photon-pair/single-photon source that utilizes cavity-enhanced four-wave mixing in a high-Q silicon microresonator. The photon-pair source has a spectral brightness of 6:25 × 108 pairs/s/mW2/GHz and a quantum cross-correlation of g(2)si (0) = (2:58 ± 0:16) × 104. The generated photons are single-mode, with a quantum self-correlation of 1:87 ± 0:05. The heralded single photons has conditional photon autocorrelation gc(2) as low as 0:0075 ± 0:0017 at 5:9 × 104 pair/s.
We propose and demonstrate a unique suspended slot-waveguide structure supported by a thin slab to realize
high-quality air-clad silicon slotted microring resonators (SMRs) on the silicon-on-insulator platform, based on a
fabrication process consisting of two-step electron beam lithography and inductively-coupled-plasma reactive-ion-
etching. Our SMRs can achieve an intrinsic optical quality factor (Q) above 105 operating at the telecom band,
which is the highest value for silicon SMRs reported to date. The demonstrated high-quality air-clad silicon SMRs
enable great potential for broad applications in biosensing, nonlinear photonics, and cavity optomechanics.