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Dr. Wei Kang
Assistant Professor at Naval Postgraduate School
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Author
Publications (4)
SPIE Journal Paper | 1 April 2007
Benchmark study of run-to-run controllers for the lithographic control of the critical dimension
JM3, Vol. 6, Issue 02, 023001, (April 2007) https://doi.org/10.1117/12.10.1117/1.2743657
KEYWORDS: Feedback control, Process control, Control systems, Device simulation, Filtering (signal processing), Manufacturing, Data modeling, Process modeling, Semiconductor manufacturing, Systems modeling
Proceedings Article | 24 March 2006 Paper
Benchmark comparison of multiple process control strategies for lithographic CD control
Proceedings Volume 6152, 61520E (2006) https://doi.org/10.1117/12.656684
KEYWORDS: Process control, Feedback control, Filtering (signal processing), Systems modeling, Device simulation, Control systems, Data processing, Performance modeling, Process modeling, Dynamical systems
Proceedings Article | 17 May 2005 Paper
Robust control of lithographic process in semiconductor manufacturing
Proceedings Volume 5755, (2005) https://doi.org/10.1117/12.600365
KEYWORDS: Data modeling, Process control, Critical dimension metrology, Feedback control, Control systems, Manufacturing, Systems modeling, Optical lithography, Mathematical modeling, Device simulation
Proceedings Article | 8 January 1999 Paper
Mobile robot tracking control in a perceptive frame
Wei Kang, Ning Xi, Osa Fitch
Proceedings Volume 3525, (1999) https://doi.org/10.1117/12.335706
KEYWORDS: Control systems, Mobile robots, Feedback control, Unmanned vehicles, Systems modeling, Vehicle control, Device simulation, Motion measurement, Computer simulations, Dynamical systems
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