Wei Li
at Colorado State Univ
SPIE Involvement:
Author | Student Chapter President
Publications (2)

PROCEEDINGS ARTICLE | March 7, 2014
Proc. SPIE. 8973, Micromachining and Microfabrication Process Technology XIX
KEYWORDS: Lithography, Nanostructures, X-ray optics, Imaging systems, Photoresist materials, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Nanoimprint lithography, Nanolithography

PROCEEDINGS ARTICLE | September 27, 2013
Proc. SPIE. 8849, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications X
KEYWORDS: Lithography, Nanostructures, Coherence imaging, Imaging systems, Printing, Photoresist materials, Photomasks, Extreme ultraviolet, X-ray lasers, Nanolithography

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top