A table top nanofabrication system which combines the classic Talbot imaging effect and a compact table top soft-x ray
laser is described in this paper. Periodic nanostructures on millimeter square are fabricated using this robust, simple and
defect tolerant fabrication method. Talbot lithography allows for a complete coherent extreme ultraviolet lithography
process in a compact table top system. Double exposure allowed for the reduction of the feature sizes.
We describe a table top nanofabrication system that utilizes the coherent Talbot imaging effect and a table-top soft x ray laser to implement a defect-free compact nanolithography tool. The Talbot lithography provides a robust and simple setup capable of printing periodic structures over millimeter square areas free of defects. Test structures were fabricated into metal layers showing a complete coherent extreme ultraviolet lithographic process in a table-top system.