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Wei Ma
at Hong Kong Univ of Science and Technology
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Publications (1)
Proceedings Article | 16 January 2003 Paper
Design and characterization of micro-inertia switches fabricated using low-temperature metal-electroplating technology
Wei Ma, Yitshak Zohar, Man Wong
Proceedings Volume 4981, (2003) https://doi.org/10.1117/12.478285
KEYWORDS: Switches, Coating, Gold, Electroplating, Aluminum, Metals, Electrodes, Numerical analysis, Microfabrication, Plating
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