Dr. Wei Sun
at Hitachi Ltd
SPIE Involvement:
Author
Publications (3)

SPIE Journal Paper | 12 May 2020
JM3 Vol. 19 Issue 02
KEYWORDS: 3D metrology, 3D applications, Monte Carlo methods, Cadmium, Solids, Scanning electron microscopy, Critical dimension metrology, Signal detection, Semiconducting wafers, Metrology

Proceedings Article | 20 March 2020
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Electron beams, Data modeling, 3D modeling, Scanning electron microscopy, Inverse problems, 3D metrology, Neural networks, Convolution

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Electron beams, Metrology, Scattering, Etching, Scanning electron microscopy, Monte Carlo methods, 3D metrology, Critical dimension metrology

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