Mr. Weidong Fang Profile

Weidong Fang

at Zhejiang Univ

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Author

Publications (2)

Proceedings Article | 12 December 2018 Paper

Optical design and analysis of a high resolution MOEMS accelerometer based on diffraction grating

Yuan Yao, Debin Pan, Anbing Geng, Haitao Wang, Jian Bai, Qianbo Lu, Peiwen Chen, Weidong Fang

Proceedings Volume 10848, 108480G (2018) https://doi.org/10.1117/12.2505677

KEYWORDS: Diffraction gratings, Microopto electromechanical systems, Optical design, Mirrors, Sensors, Structural sensing, Optical resonators, Interferometry, Mechanical sensors, Modal analysis

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Proceedings Article | 5 November 2018 Paper

Thermal stress of MOEMS accelerometers based on grating interferometric cavity

Weidong Fang, Qianbo Lu, Jian Bai, Dandan Han, Peiwen Chen

Proceedings Volume 10815, 108151H (2018) https://doi.org/10.1117/12.2502273

KEYWORDS: Adhesives, Microopto electromechanical systems, Interferometry, Finite element methods, Silicon, Packaging, Thermal effects, Microelectromechanical systems, Thermal modeling, Sensors

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