Dr. Weijie Shi
at Shanghai Institute of Optics and Fine Mechanics
SPIE Involvement:
Author
Publications (6)

PROCEEDINGS ARTICLE | May 19, 2006
Proc. SPIE. 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
KEYWORDS: Lithography, Monochromatic aberrations, Optical lithography, Fluctuations and noise, Coherence (optics), Optical testing, Ray tracing, Projection systems, Optical alignment, Semiconducting wafers

PROCEEDINGS ARTICLE | May 19, 2006
Proc. SPIE. 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
KEYWORDS: Wafer-level optics, Lithography, Metrology, Optical lithography, Interferometers, Interferometry, Optical testing, Time metrology, Semiconducting wafers, Tolerancing

SPIE Journal Paper | May 1, 2006
OE Vol. 45 Issue 05
KEYWORDS: Adaptive optics, Optical alignment, Projection systems, Lithography, Semiconducting wafers, Imaging systems, Image quality, Distortion, Monochromatic aberrations, Optical engineering

PROCEEDINGS ARTICLE | January 27, 2005
Proc. SPIE. 5645, Advanced Microlithography Technologies
KEYWORDS: Lithography, Monochromatic aberrations, Optical lithography, Calibration, Adaptive optics, Image quality, Line width roughness, Optical alignment, Photoresist processing, Semiconducting wafers

PROCEEDINGS ARTICLE | January 27, 2005
Proc. SPIE. 5645, Advanced Microlithography Technologies
KEYWORDS: Diffraction, Monochromatic aberrations, Phase shifting, Coherence (optics), Wavefronts, Image sensors, Photomasks, Semiconducting wafers, Binary data, Resolution enhancement technologies

PROCEEDINGS ARTICLE | January 27, 2005
Proc. SPIE. 5645, Advanced Microlithography Technologies
KEYWORDS: Lithography, Monochromatic aberrations, Imaging systems, Adaptive optics, Artificial neural networks, Neural networks, Optical alignment, Semiconducting wafers, Evolutionary algorithms, Neurons

Showing 5 of 6 publications
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