Dr. Weijie Wang
at Bruker Nano Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 2 April 2020 Presentation + Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: X-ray optics, Metrology, Visualization, Gallium arsenide, Atomic force microscopy, Scanning electron microscopy, Transmission electron microscopy, 3D metrology, Measurement devices, Semiconducting wafers

Proceedings Article | 20 March 2020 Presentation + Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Metrology, Calibration, Atomic force microscopy, Scanning electron microscopy, Scatterometry, Extreme ultraviolet, Critical dimension metrology, Line edge roughness, Semiconducting wafers, Stochastic processes

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