Dr. Weilun Chao
Research Scientist at Lawrence Berkeley National Lab
SPIE Involvement:
Publications (58)

Proceedings Article | 10 April 2024 Presentation
Proceedings Volume 12955, 129550A (2024) https://doi.org/10.1117/12.3010967
KEYWORDS: Scattering, X-rays, X-ray imaging, X-ray characterization, Photoresist materials, X-ray sources, Data modeling, Light scattering, Laser scattering, Extreme ultraviolet lithography

Proceedings Article | 22 November 2023 Poster
Proceedings Volume PC12750, PC1275012 (2023) https://doi.org/10.1117/12.2689943
KEYWORDS: Scattering, X-rays, X-ray imaging, Metrology, Systems modeling, X-ray sources, X-ray characterization, Time metrology, Spatial resolution, Simulations

Proceedings Article | 4 October 2023 Presentation + Paper
K. Munechika, S. Rochester, W. Chao, I. Lacey, C. Pina-Hernandez, Kaito Yamada, M. Biskach, A. Numata, V. Yashchuk
Proceedings Volume 12677, 1267708 (2023) https://doi.org/10.1117/12.2677966
KEYWORDS: Metrology, Calibration, Optical surfaces, Microscopes, X-rays, Fabrication, Wavefronts, Mirror surfaces, Interferometry, Semiconducting wafers

Proceedings Article | 31 October 2022 Poster
Proceedings Volume PC12292, PC122920Y (2022) https://doi.org/10.1117/12.2645263
KEYWORDS: Extreme ultraviolet, Ruthenium, Phase shifts, Photomasks, Stochastic processes, Resolution enhancement technologies, Extreme ultraviolet lithography, Double patterning technology, Reticles, Optical lithography

Proceedings Article | 4 October 2022 Presentation + Paper
Valeriy Yashchuk, Keiko Munechika, Simon Rochester, Weilun Chao, Ian Lacey, Carlos Pina-Hernandez, Peter Takacs
Proceedings Volume 12240, 122400D (2022) https://doi.org/10.1117/12.2633476
KEYWORDS: Microscopes, Calibration, Zoom lenses, Interferometry, Spatial frequencies, Deconvolution, Reflectivity, Metrology, Objectives, Binary data

Showing 5 of 58 publications
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