Dr. Weiming Ren Profile

Dr. Weiming Ren

Fellow at ASML/HMI USA

SPIE Involvement:

Author

Publications (9)

PROCEEDINGS ARTICLE | October 3, 2018

Multiple beam technology development and application for defect inspection on EUV wafer/mask

Proc. SPIE. 10810, Photomask Technology 2018

KEYWORDS: Defect detection, Inspection, Computing systems, Scanning electron microscopy, Wafer inspection, Photomasks, Extreme ultraviolet lithography, Semiconducting wafers, Defect inspection

Read Abstract +

PROCEEDINGS ARTICLE | March 13, 2018

Holistic approach for overlay and edge placement error to meet the 5nm technology node requirements

Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII

KEYWORDS: Lithography, Electron beams, Metrology, Logic, Scanners, Extreme ultraviolet lithography, Optical proximity correction, Critical dimension metrology, Semiconducting wafers, Overlay metrology

Read Abstract +

PROCEEDINGS ARTICLE | March 13, 2018

Cutting edge multiple beam technology for EUV era: latest development progress and application

Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII

KEYWORDS: Semiconductors, Image processing, Inspection, Computing systems, Scanning electron microscopy, Image quality, Photomasks, Extreme ultraviolet, Semiconducting wafers

Read Abstract +

PROCEEDINGS ARTICLE | June 16, 2003

Novel electron optics for large subfield electron-beam projection lithography (EPL)

Proc. SPIE. 5037, Emerging Lithographic Technologies VII

KEYWORDS: Wafer-level optics, Electron beam lithography, Diffraction, Point spread functions, Reticles, Distortion, Convolution, Geometrical optics, Semiconducting wafers, Projection lithography

Read Abstract +

SPIE Journal Paper | June 1, 1998

Online fast measurement of section sized of three-dimensional objects using binary image analysis

WeiMing Ren, Yalei Wang, Hao Zhu, Peimao Sun

OE Vol. 37 Issue 06

KEYWORDS: Image segmentation, Binary data, Cameras, Calibration, 3D image processing, Image processing, Image analysis, Environmental sensing, Image processing algorithms and systems, Inspection

PROCEEDINGS ARTICLE | November 14, 1996

Application of image processing on the online measurement of dimensions in the section of the hot-rolled section steel

Proc. SPIE. 2847, Applications of Digital Image Processing XIX

KEYWORDS: 3D acquisition, Cameras, Image segmentation, Image processing, Image acquisition, Image analysis, Data acquisition, 3D metrology, Binary data, 3D image processing

Read Abstract +

PROCEEDINGS ARTICLE | June 14, 1995

Heterodyne interferometer with a dual-mode HeNe laser for absolute distance interferometry

Proc. SPIE. 2544, Interferometry VII: Techniques and Analysis

KEYWORDS: Interferometers, Interferometry, Heterodyning, Signal processing, Distance measurement, Laser stabilization, Laser interferometry, Phase measurement, Bragg cells, Helium neon lasers

Read Abstract +

PROCEEDINGS ARTICLE | August 5, 1994

On-line measuring the section shape of a moving workpiece

Proc. SPIE. 2321, Second International Conference on Optoelectronic Science and Engineering '94

Read Abstract +

PROCEEDINGS ARTICLE | September 22, 1993

Infrared multiwavelength He-Ne laser absolute-distance interferometer for diameter measurement of large-scale workpiece

Proc. SPIE. 2101, Measurement Technology and Intelligent Instruments

KEYWORDS: Reflectors, Interferometers, Magnetism, Infrared lasers, Distance measurement, Laser stabilization, Infrared radiation, Neon, Helium neon lasers, Laser optics

Read Abstract +

Showing 5 of 9 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years