Dr. Weiping Chen Profile

Dr. Weiping Chen

at Harbin Institute of Technology

SPIE Involvement:

Author

Publications (9)

Proceedings Article | 31 December 2008 Paper

A system-level simulation of force-balance MEMS accelerometers by VHDL_AMS

Xiaochuan Tang, Yufeng Zhang, Weiping Chen, Xiaowei Liu

Proceedings Volume 7130, 71300R (2008) https://doi.org/10.1117/12.819564

KEYWORDS: Microelectromechanical systems, Electrodes, Mathematical modeling, Systems modeling, Interfaces, Control systems, Capacitance, Electronics, Mechanical sensors, Linear filtering

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Proceedings Article | 1 November 2007 Paper

A bulk micromachined gyroscope with improved quality-factors at atmospheric pressure

Weiping Chen, Hong Chen, Xiaowei Liu, Tian Han, Hao Wang

Proceedings Volume 6423, 642308 (2007) https://doi.org/10.1117/12.779200

KEYWORDS: Gyroscopes, Microelectromechanical systems, Deep reactive ion etching, Capacitance, Silicon, Atmospheric sensing, Etching, Sensors, Semiconducting wafers, Ions

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Proceedings Article | 21 March 2006 Paper

Damping characteristic analysis of MEMS inertial devices

Yufeng Zhang, Xiaowei Liu, Weiping Chen

Proceedings Volume 6040, 60400E (2006) https://doi.org/10.1117/12.664148

KEYWORDS: Microelectromechanical systems, Microfluidics, Motion models, Finite element methods, Structural dynamics, Modal analysis, Computer simulations, Instrument modeling, Holmium, Systems modeling

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Proceedings Article | 21 March 2006 Paper

A hybrid micro-accelerometer system with CMOS readout circuit and self-test function

Weiping Chen, Hong Chen, Xiaowei Liu, Xiaoyun Tan

Proceedings Volume 6040, 604004 (2006) https://doi.org/10.1117/12.664131

KEYWORDS: Electrodes, Sensors, Silicon, Deep reactive ion etching, Photomasks, Silica, Capacitance, Etching, Aluminum, Bulk micromachining

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Proceedings Article | 20 February 2006 Paper

A novel integrated capillary electrophoresis chip with a self-rinsing micropump

L. Tian, W. Wang, W. Chen, X. Liu, Zh. Bao

Proceedings Volume 6041, 60411E (2006) https://doi.org/10.1117/12.664332

KEYWORDS: Capillaries, Ferroelectric materials, Silicon, Polymethylmethacrylate, Power supplies, Microfabrication, Microelectromechanical systems, Liquids, Microfluidics, Electrodes

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Proceedings Article | 30 December 2004 Paper

A high-g overload-protected accelerometer with a novel microstructure

Weiping Chen, Wei Wang, Lei Tian, Xiaowei Liu, Mingxue Huo, Ruichao Zhang, Deyin Zhang

Proceedings Volume 5641, (2004) https://doi.org/10.1117/12.581191

KEYWORDS: Wheatstone bridges, Finite element methods, Bridges, Silicon, Resistance, Sensors, Beam shaping, Computer simulations, Optical simulations, Etching

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Proceedings Article | 24 April 2003 Paper

Simulation of bulk micromachined vibration sensor with low noise

Xiaowei Liu, Mingxue Huo, Weiping Chen, Qiang Chen

Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.498848

KEYWORDS: Sensors, Finite element methods, Microelectromechanical systems, Bulk micromachining, Silicon, Optical simulations, Vibration simulation, Deep reactive ion etching, Structural design, Microelectronics

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