Dr. Weiping Chen
at Harbin Institute of Technology
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 31 December 2008
Proc. SPIE. 7130, Fourth International Symposium on Precision Mechanical Measurements
KEYWORDS: Mathematical modeling, Microelectromechanical systems, Electronics, Electrodes, Interfaces, Control systems, Linear filtering, Capacitance, Systems modeling, Mechanical sensors

Proceedings Article | 1 November 2007
Proc. SPIE. 6423, International Conference on Smart Materials and Nanotechnology in Engineering
KEYWORDS: Microelectromechanical systems, Sensors, Etching, Ions, Silicon, Capacitance, Deep reactive ion etching, Gyroscopes, Semiconducting wafers, Atmospheric sensing

Proceedings Article | 21 March 2006
Proc. SPIE. 6040, ICMIT 2005: Mechatronics, MEMS, and Smart Materials
KEYWORDS: Microelectromechanical systems, Microfluidics, Computer simulations, Modal analysis, Finite element methods, Holmium, Motion models, Structural dynamics, Systems modeling, Instrument modeling

Proceedings Article | 21 March 2006
Proc. SPIE. 6040, ICMIT 2005: Mechatronics, MEMS, and Smart Materials
KEYWORDS: Silica, Sensors, Etching, Electrodes, Silicon, Capacitance, Photomasks, Aluminum, Deep reactive ion etching, Bulk micromachining

Proceedings Article | 20 February 2006
Proc. SPIE. 6041, ICMIT 2005: Information Systems and Signal Processing
KEYWORDS: Microelectromechanical systems, Ferroelectric materials, Microfluidics, Polymethylmethacrylate, Electrodes, Capillaries, Silicon, Power supplies, Microfabrication, Liquids

Proceedings Article | 30 December 2004
Proc. SPIE. 5641, MEMS/MOEMS Technologies and Applications II
KEYWORDS: Sensors, Etching, Silicon, Resistance, Computer simulations, Finite element methods, Bridges, Optical simulations, Beam shaping, Wheatstone bridges

Showing 5 of 9 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top