Weiqi Li
at Huazhong Univ of Science and Technology
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | June 21, 2015
Proc. SPIE. 9526, Modeling Aspects in Optical Metrology V
KEYWORDS: Ellipsometry, Nanostructures, Mueller matrices, Metrology, Sensors, Matrices, Silicon, Wave plates, Scanning electron microscopy, Prototyping

PROCEEDINGS ARTICLE | June 21, 2015
Proc. SPIE. 9526, Modeling Aspects in Optical Metrology V
KEYWORDS: Optical components, Magnesium fluoride, Polarization, Calibration, Error analysis, Crystals, Wave plates, Wave propagation, Geometrical optics, Prototyping

PROCEEDINGS ARTICLE | October 10, 2013
Proc. SPIE. 8916, Sixth International Symposium on Precision Mechanical Measurements
KEYWORDS: Mueller matrices, Metrology, Data modeling, Silicon, Polarimetry, Scanning electron microscopy, Photoresist materials, Scatterometry, Optics manufacturing, Statistical modeling

PROCEEDINGS ARTICLE | January 31, 2013
Proc. SPIE. 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation
KEYWORDS: Optical components, Mirrors, Prisms, Polarization, Birefringence, Error analysis, Interference (communication), Numerical simulations, Polarizers, Condition numbers

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top