Pupil filtering is a widely used super-resolving technique. This technique utilizes one or more diffractive superresolution
elements (DSEs) to break the diffraction limit. This paper focused on the tolerance analysis of DSEs.
Although the analysis in this paper was based on a specific super-resolution system, it was sufficient to demonstrate our
efforts and make some conclusions. Generally, two types of tolerances have been taken into consideration. One is DSE's
position tolerance. The other is the tolerance of DSE's phase transmittance. With the presented method, it is able to
evaluate the influence of DSE tolerances on a super-resolution optical system, and thus to guide practical fabrication.