Wen-Chuan Tai
at National Chiao Tung Univ
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | April 24, 2003
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Actuators, Copper, Nickel, 3D modeling, Microactuators, Finite element methods, Convection, Mechanical engineering, Electroplating, 3D microstructuring

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