Wen-Chuan Wang
at Taiwan Semiconductor Manufacturing Company, Ltd
SPIE Involvement:
Publications (4)

Proceedings Article | 19 March 2015 Paper
Proceedings Volume 9423, 94231P (2015) https://doi.org/10.1117/12.2085278
KEYWORDS: Image compression, Chromium, Data storage, Associative arrays, Algorithm development, Optical fibers, Computer programming, Direct write lithography, Data analysis, Manufacturing

Proceedings Article | 27 March 2014 Paper
Proceedings Volume 9051, 90511J (2014) https://doi.org/10.1117/12.2046240
KEYWORDS: Line edge roughness, Electron beams, Chemically amplified resists, Electron beam lithography, Diffusion, Chemical reactions, Image acquisition, Polymers, Photoresist processing, Lithography

Proceedings Article | 26 March 2013 Paper
Thomas Gubiotti, Jeff Fuge Sun, Regina Freed, Francoise Kidwingira, Jason Yang, Chris Bevis, Allen Carroll, Alan Brodie, William Tong, Shy-Jay Lin, Wen-Chuan Wang, Luc Haspeslagh, Bart Vereecke
Proceedings Volume 8680, 86800H (2013) https://doi.org/10.1117/12.2010722
KEYWORDS: Semiconducting wafers, Electron beam lithography, Lithography, Coating, Logic, Electron beams, Polymethylmethacrylate, Printing, Reflectivity, Silica

Proceedings Article | 26 March 2013 Paper
Proceedings Volume 8680, 86801C (2013) https://doi.org/10.1117/12.2010865
KEYWORDS: Electroluminescence, Raster graphics, Scattering, Monte Carlo methods, Silica, Diffusion, Laser scattering, Quantization, Modulation transfer functions, Backscatter

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