Wen-Chuan Wang
at Taiwan Semiconductor Manufacturing Company, Ltd
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Optical fibers, Image compression, Data storage, Manufacturing, Chromium, Computer programming, Associative arrays, Algorithm development, Direct write lithography, Data analysis

PROCEEDINGS ARTICLE | March 27, 2014
Proc. SPIE. 9051, Advances in Patterning Materials and Processes XXXI
KEYWORDS: Lithography, Electron beam lithography, Electron beams, Polymers, Diffusion, Image acquisition, Chemical reactions, Line edge roughness, Photoresist processing, Chemically amplified resists

PROCEEDINGS ARTICLE | March 26, 2013
Proc. SPIE. 8680, Alternative Lithographic Technologies V
KEYWORDS: Silica, Backscatter, Scattering, Diffusion, Laser scattering, Electroluminescence, Monte Carlo methods, Quantization, Raster graphics, Modulation transfer functions

PROCEEDINGS ARTICLE | March 26, 2013
Proc. SPIE. 8680, Alternative Lithographic Technologies V
KEYWORDS: Lithography, Electron beam lithography, Electron beams, Logic, Polymethylmethacrylate, Silica, Coating, Reflectivity, Printing, Semiconducting wafers

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