Dr. Wen-Chun Huang
at Taiwan Semiconductor Manufacturing Co Ltd
SPIE Involvement:
Author
Publications (12)

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Diffraction, Scattering, Calibration, Inspection, 3D modeling, 3D metrology, Wafer inspection, Photomasks, Semiconducting wafers, 3D image processing

PROCEEDINGS ARTICLE | March 31, 2014
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Lithography, Visual process modeling, Data modeling, Calibration, Diffusion, 3D modeling, Scanning electron microscopy, Optical proximity correction, Semiconducting wafers, 3D image processing

PROCEEDINGS ARTICLE | April 10, 2013
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Lithography, Calibration, Diffusion, 3D modeling, Scanning electron microscopy, Photoresist materials, Optical proximity correction, Critical dimension metrology, Performance modeling, 3D image processing

PROCEEDINGS ARTICLE | March 14, 2012
Proc. SPIE. 8326, Optical Microlithography XXV
KEYWORDS: Reticles, 3D acquisition, 3D image reconstruction, Reflection, Calibration, Scanning electron microscopy, Photoresist materials, Refraction, Photomasks, Semiconducting wafers

PROCEEDINGS ARTICLE | March 13, 2012
Proc. SPIE. 8326, Optical Microlithography XXV
KEYWORDS: Atrial fibrillation, Cadmium, Data modeling, Calibration, 3D modeling, Scanning electron microscopy, Printing, Optical proximity correction, SRAF, Semiconducting wafers

PROCEEDINGS ARTICLE | March 16, 2009
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Optical lithography, Lithographic illumination, Detection and tracking algorithms, Image segmentation, Photomasks, Semiconductor manufacturing, Immersion lithography, Optical proximity correction, Neodymium, Resolution enhancement technologies

Showing 5 of 12 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top