Dr. Wen-Hao W. Cheng
Deputy Director at Taiwan Semiconductor Manufacturing Co Ltd
SPIE Involvement:
Author
Publications (18)

Proceedings Article | 7 March 2008
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Electron beam lithography, Optical lithography, Etching, Glasses, Image resolution, Chromium, 3D modeling, Photomasks, Semiconducting wafers, Defect inspection

Proceedings Article | 7 March 2008
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Optical lithography, Cadmium, Modulation, Etching, Glasses, Image transmission, Photomasks, SRAF, Semiconducting wafers, Phase shifts

Proceedings Article | 7 March 2008
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Optical lithography, Imaging systems, Glasses, Near field, Projection systems, Image transmission, Photomasks, Mask making, Semiconducting wafers, Resolution enhancement technologies

SPIE Journal Paper | 1 January 2008
JM3 Vol. 7 Issue 01
KEYWORDS: Photomasks, Polarization, Diffraction, Optical proximity correction, Pellicles, Chromium, Fiber optic illuminators, Lithography, Optical lithography, Diffraction gratings

Proceedings Article | 30 October 2007
Proc. SPIE. 6730, Photomask Technology 2007
KEYWORDS: Finite-difference time-domain method, Optical lithography, Silica, Glasses, Diffusion, Chromium, Printing, Photomasks, Semiconducting wafers, Binary data

Showing 5 of 18 publications
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