Dr. Wengang Wu
at Peking Univ
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | December 30, 2004
Proc. SPIE. 5641, MEMS/MOEMS Technologies and Applications II
KEYWORDS: Actuators, Mirrors, Etching, Silicon, Telecommunications, Micromirrors, Optical switching, Analog electronics, Semiconducting wafers, Optical actuators

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