Wenhong Zhou
at Shanghai Institute of Technical Physics
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | February 9, 2009
Proc. SPIE. 7158, 2008 International Conference on Optical Instruments and Technology: Microelectronic and Optoelectronic Devices and Integration
KEYWORDS: Mercury cadmium telluride, Etching, Argon, Dry etching, Atomic force microscopy, Plasma etching, Chemical analysis, Scanning probe microscopy, Reactive ion etching, Plasma

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