Mr. Wenjie Lu
at
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 17, 2012
Proc. SPIE. 8328, Advanced Etch Technology for Nanopatterning
KEYWORDS: Ultraviolet radiation, Dielectrics, Ions, Silicon, Nitrogen, Oxygen, Synchrotrons, Vacuum ultraviolet, Plasma systems, Plasma

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