Dr. Wenxin Li
at GLOBALFOUNDRIES Inc
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Metrology, Data modeling, Deep ultraviolet, Etching, Scanning electron microscopy, Photoresist materials, Extreme ultraviolet, Extreme ultraviolet lithography, Optical proximity correction, Critical dimension metrology

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