Dr. Wenyang Pan Profile

Dr. Wenyang Pan

at Cornell Univ

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Publications (2)

Proceedings Article | 25 March 2019 Paper

Development of metal organic cluster EUV photoresists

Kazunori Sakai, Seok Heon Jung, Wenyang Pan, Emmanuel Giannelis, Christopher Ober

Proceedings Volume 10960, 1096015 (2019) https://doi.org/10.1117/12.2516133

KEYWORDS: Metals, Extreme ultraviolet lithography, Photoresist materials, Deep ultraviolet, Extreme ultraviolet, Lithography, Nanoparticles, Oxides

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Proceedings Article | 20 March 2019 Presentation + Paper

Metal organic cluster photoresists: new metal oxide systems

Kazunori Sakai, Seok-Heon Jung, Wenyang Pan, Emmanuel Giannelis, Christopher Ober

Proceedings Volume 10963, 1096306 (2019) https://doi.org/10.1117/12.2515148

KEYWORDS: Metals, Zirconium, Nanoparticles, Oxides, Extreme ultraviolet lithography, Zinc, Photoresist materials, Etching, Extreme ultraviolet, Lithography

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