Dr. Wenyang Pan
at Cornell Univ
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 25 March 2019
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Oxides, Lithography, Deep ultraviolet, Nanoparticles, Metals, Photoresist materials, Extreme ultraviolet, Extreme ultraviolet lithography

Proceedings Article | 20 March 2019
Proc. SPIE. 10963, Advanced Etch Technology for Nanopatterning VIII
KEYWORDS: Oxides, Lithography, Nanoparticles, Etching, Metals, Zinc, Photoresist materials, Extreme ultraviolet, Extreme ultraviolet lithography, Zirconium

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