Wico C.L. Hopman
at Univ of Twente
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 18 April 2006
Proc. SPIE. 6182, Photonic Crystal Materials and Devices III (i.e. V)
KEYWORDS: Lithography, Waveguides, Etching, Crystals, Dielectrics, Silicon, Photonic crystals, Ion beams, Silicon photonics, Reactive ion etching

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