Dr. Wilfrido Calleja-Arriaga
at INAOE
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | February 24, 2009
Proc. SPIE. 7204, Micromachining and Microfabrication Process Technology XIV
KEYWORDS: Microelectromechanical systems, Packaging, Optical fibers, Waveguides, Silicon, Microopto electromechanical systems, Microlens, Epoxies, Optical alignment, Tolerancing

PROCEEDINGS ARTICLE | February 8, 2008
Proc. SPIE. 6887, MOEMS and Miniaturized Systems VII
KEYWORDS: Mirrors, Visible radiation, Optical lithography, Etching, Electrodes, Scanners, Silicon, Micromirrors, Device simulation, Polysomnography

PROCEEDINGS ARTICLE | July 1, 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Microelectromechanical systems, Oxides, Thin films, Sensors, Silicon, Resistance, Silicon films, Transistors, Zinc oxide, Carbon monoxide

PROCEEDINGS ARTICLE | February 18, 2004
Proc. SPIE. 5249, Optical Design and Engineering
KEYWORDS: Telescopes, Lenses, Silicon, Wavefronts, Collimation, Microlens, Infrared radiation, Modulation transfer functions, Optical instrument design, Phased array optics

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