An investigation study concerning positioning, alignment, bonding and packaging of optical fibers for interfacing with
optical MEMS devices is being reviewed in this paper. The study includes a review of techniques and critical issues for
optical fiber positioning, alignment, bonding, optical improvements, and coupling and interfacing through micro-lenses
and waveguides. Also, we present a packaging design structure for hermetic sealing of optical MEMS devices requiring
interfacing through optical fibers which considers aspects such as processes, assemble schemes and bonding techniques
for Optical Fibers, which are briefly reviewed in this work. This packaging design considers the following conditions:
hermeticity of the MEMS devices, optical fiber and MEMS die alignment and positioning, assembly process, and Simachined
fixturing design for final assembly and positioning.
A mobile (electrostatic) flat mirror is designed to bend visible light, and can be fabricated on crystalline silicon by means
of photolithography and humid etching. Using the CoventorWareTM software we carry out a simulation of the fabrication process as well as the movement versus voltage of the mobile (electrostatic) flat mirror, which dimensions are 50
microns large by 40 microns width. The required voltage to move the flat mirror 2.17° is 38.1 V. The flatness of the
micro-mirror is enough to bend the light in the visible range.
In this work a thin film gas microsensor based on both a double polysilicon micro-hotplate (MHP) and a polysilicon floating gate MIS transistor (FG-MIS) is described. Sensing section is a squared polysilicon plate which contains a doped Zinc Oxide (ZnO) thin film. The sensing section is heated by an U-shaped polysilicon stripe which is electrically isolated from the top and the bottom using oxide films. The micro-hotplate is both mechanically supported and thermally isolated using a deep cavity micromachined in the silicon substrate. The sensing film is electrically connected to the floating-gate transistor where the conductivity channel is modulated by the charged generated at the sensing film. The sensor structure was characterized for detecting carbon monoxide (CO) at 300 °C. The hot area is thermally isolated using an arrangement of cavities micromachined in the silicon substrate. Finally a complete layout of the sensor system is presented in this paper.
We shown the designs of optical collimators for wave length of 1.5 µm. The design is based in the Galilean Telescope formed with two kinds of lenses a convergent and a divergent. This design is a silicon negative microlens of 300 µm and of diameter and the positive lenses are discussing between several different materials of 6 mm of diameter, it is to determinate the best performance of the optical setup type Galilean telescope, the parameters of aberration and deviation rms. y p-v, we help to obtain the best system comparing the quantitative results that in this case was LaF3.