Dr. Wilfried Clauss
at Carl Zeiss SMT GmbH
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 15 March 2006
Proc. SPIE. 6154, Optical Microlithography XIX
KEYWORDS: Oxides, Magnesium, Optical properties, Crystals, Germanium, Ceramics, Aluminum, Lutetium, Garnet, Spinel

Proceedings Article | 1 July 2002
Proc. SPIE. 4688, Emerging Lithographic Technologies VI
KEYWORDS: Optical components, Lithography, Aberration correction, Tolerancing

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