Dr. Wilfried Rabaud Profile

Dr. Wilfried Rabaud

at MINATEC

SPIE Involvement:

Author

Publications (15)

Proceedings Article | 13 June 2023 Presentation + Paper

Small pixel pitch MCT P on N MWIR photodiodes at DEFIR: towards 7.5um and beyond with very high image quality

N. Baier, O. Gravrand, T. Le Goff, C. Lobre, W. Rabaud, F. Rochette, A. Brunner, C. Grezes, N. Morisset, L. Rubaldo

Proceedings Volume 12534, 1253413 (2023) https://doi.org/10.1117/12.2663760

KEYWORDS: Diodes, Readout integrated circuits, Photodiodes, Mercury cadmium telluride, Design and modelling, Modulation transfer functions, Quantum efficiency

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Proceedings Article | 27 May 2022 Presentation + Paper

Design of a small pitch (7.5µm) MWIR HgCdTe array operating at high temperature (130K) with high imaging performances

Olivier Gravrand, Clément Lobre, Jean Louis Santailler, Nicolas Baier, Wilfried Rabaud, Alexandre Kerlain, Diane Sam-Giao, Pascal Leboterf, Benoit Cornus, Laurent Rubaldo

Proceedings Volume 12107, 121070U (2022) https://doi.org/10.1117/12.2618852

KEYWORDS: Diodes, Readout integrated circuits, Quantum efficiency, Mercury cadmium telluride, Sensors

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Proceedings Article | 27 May 2022 Presentation + Paper

Recent thermoresistive material evolutions at LYNRED for improving uncooled microbolometer products thermal sensitivity

Marc Guillaumont, Stéphane Altazin, Alexi Cardoso, Sébastien Tinnes, Claire Pistre, Alain Durand, Aurélien Dariel, Fabio Rossini, Clémence Laurent, Christine Fréal, Gérard Mandran, Christian Bellon, Sébastien Cortial, Matthieu Cueff, Christophe Pautet, Nicolas Boudou, Sarah Gays, Xavier Zucchi, Denis Pelenc, Jean-Jacques Yon, Wilfried Rabaud, Valérie Goudon, Claire Vialle, Stéphane Pocas, Delphine Brellier, Rachid Hida, Tony Jullien, Zouhir Mehrez, Elisa Vermande, Antoine Schembri, Pierre Brianceau

Proceedings Volume 12107, 1210716 (2022) https://doi.org/10.1117/12.2618494

KEYWORDS: Staring arrays, Microbolometers, Amorphous silicon, Sensors, Manufacturing, Signal to noise ratio, Amorphous semiconductors

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Proceedings Article | 9 July 2018 Paper

Fabrication and characterization of cooled silicon bolometers for mm wave detection

V. Goudon, A. Aliane, C. Vialle, W. Rabaud, S. Pocas, H. Kaya, R. Torrecillas, J.-L. Ouvrier-Buffet, L. Dussopt, P. Agnese, S. Becker, S. Bounissou, O.-A. Adami, V. Reveret, J.-L. Sauvageot, L. Rodriguez

Proceedings Volume 10708, 107083O (2018) https://doi.org/10.1117/12.2313328

KEYWORDS: Bolometers, Silicon, Resistance, Sensors, Semiconducting wafers, Absorption, Polarization, Astronomy, Fabrication

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CEA has a long history of customizing optoelectronic components for space and astronomy applications. Based on this expertise, we are undertaking the development of cooled silicon bolometers for millimetre-wave (mm-wave) polarization detection in the next generation of space astronomy missions such as SPICA. Silicon bolometer technology has been demonstrated successfully in space conditions through the Herschel mission. There are many benefits of this technology such as the use of a simple and low-power read-out circuit that can be integrated below the detector array in an above-IC (Integrated Circuit) integration scheme. The advanced integration in a large array and the fabrication process based on microelectronics techniques are key challenges for these developments. This work presents the early results on the design, the fabrication and the first characterization of an innovative pixel for mm-wave polarization detection. The aim is to have an adapted absorption around λ=1.5 mm. These bolometers are composed of an absorbing layer and a thermometer, which are thermally insulated from the substrate. To increase the sensitivity, these detectors are working at very low temperature typically between 50 and 100 mK. The suspended thermometer is made of silicon implanted with Phosphorus and Boron species, and we optimized the design to have a high sensitivity with a 3D Variable Range Hopping conduction (Efros law) and a low 1/f noise at low temperature. The heat capacity of the bolometer is optimized by using a meander shape of the thermometer together with superconducting Ti/TiN thin films for the electromagnetic wave absorption. This sensor is implemented on a standard SOI substrate. Measurements of test structures at room temperature, and first results at very low temperature have been performed to evaluate the electrical performances of the fabricated detectors. The mechanical behaviour of released structures, including pixels with a pitch of 1200μm and 600μm, is presented and discussed.

Proceedings Article | 23 July 2014 Paper

The ArTeMiS wide-field sub-millimeter camera: preliminary on-sky performance at 350 microns

Vincent Revéret, Philippe André, Jean Le Pennec, Michel Talvard, Patrick Agnèse, Agnès Arnaud, Laurent Clerc, Carlos de Breuck, Jean-Charles Cigna, Cyrille Delisle, Eric Doumayrou, Lionel Duband, Didier Dubreuil, Luc Dumaye, Eric Ercolani, Pascal Gallais, Elodie Groult, Thierry Jourdan, Bernadette Leriche, Bruno Maffei, Michel Lortholary, Jérôme Martignac, Wilfried Rabaud, Johan Relland, Louis Rodriguez, Aurélie Vandeneynde, François Visticot

Proceedings Volume 9153, 915305 (2014) https://doi.org/10.1117/12.2055985

KEYWORDS: Telescopes, Cameras, Sensors, Electronics, Bolometers, Cryogenics, Mirrors, Space telescopes, Mars, Stars

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Proceedings Article | 24 September 2013 Paper

Antenna-coupled microbolometer based uncooled 2D array and camera for 2D real-time terahertz imaging

F. Simoens, J. Meilhan, S. Gidon, G. Lasfargues, J. Lalanne Dera, J. L. Ouvrier-Buffet, S. Pocas, W. Rabaud, F. Guellec, B. Dupont, S. Martin, A. C. Simon

Proceedings Volume 8846, 88460O (2013) https://doi.org/10.1117/12.2024861

KEYWORDS: Terahertz radiation, Cameras, Antennas, Bolometers, Silicon, Staring arrays, Microbolometers, Quantum cascade lasers, Sensors, Absorption

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Proceedings Article | 27 March 2013 Paper

Technological customization of uncooled amorphous silicon microbolometer for THz real time imaging

S. Pocas, E. Deronzier, P. Brianceau, P. Imperinetti, G. Dumont, A. Roule, W. Rabaud, J. Meilhan, F. Simoens, V. Goudon, Claire Vialle, A. Arnaud

Proceedings Volume 8624, 862419 (2013) https://doi.org/10.1117/12.2001259

KEYWORDS: Terahertz radiation, Copper, Semiconducting wafers, Oxides, Etching, Microbolometers, Real time imaging, Bolometers, Antennas, Amorphous silicon

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Proceedings Article | 26 October 2012 Paper

Innovative monolithic detector for tri-spectral (THz, IR, Vis) imaging

S. Pocas, M. Perenzoni, N. Massari, F. Simoens, J. Meilhan, W. Rabaud, S. Martin, B. Delplanque, P. Imperinetti, V. Goudon, C. Vialle, A. Arnaud

Proceedings Volume 8544, 85440F (2012) https://doi.org/10.1117/12.974970

KEYWORDS: Terahertz radiation, Bolometers, Infrared radiation, Infrared bolometers, Infrared imaging, Sensors, Visible radiation, Semiconducting wafers, Infrared sensors, Antennas

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Proceedings Article | 24 October 2012 Paper

320 x 240 uncooled IRFPA with pixel wise thin film vacuum packaging

J-J. Yon, G. Dumont, W. Rabaud, S. Becker, L. Carle, V. Goudon, C. Vialle, A. Hamelin, A. Arnaud

Proceedings Volume 8541, 85410D (2012) https://doi.org/10.1117/12.974846

KEYWORDS: Microbolometers, Packaging, Semiconducting wafers, Infrared radiation, Infrared sensors, Sensors, Bolometers, Resistance, Thin films, Staring arrays

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Proceedings Article | 31 May 2012 Paper

Current progress on pixel level packaging for uncooled IRFPA

G. Dumont, W. Rabaud, J.-J. Yon, L. Carle, V. Goudon, C. Vialle, Sébastien Becker, Antoine Hamelin, A. Arnaud

Proceedings Volume 8353, 83531I (2012) https://doi.org/10.1117/12.919918

KEYWORDS: Bolometers, Resistance, Packaging, Microbolometers, Semiconducting wafers, Imaging devices, Infrared imaging, Infrared sensors, Measurement devices, Thermography

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Proceedings Article | 21 May 2011 Paper

Pixel level packaging for uncooled IRFPA

G. Dumont, W. Rabaud, X. Baillin, JL. Pornin, L. Carle, V. Goudon, C. Vialle, M. Pellat, A. Arnaud

Proceedings Volume 8012, 80121I (2011) https://doi.org/10.1117/12.883852

KEYWORDS: Packaging, Bolometers, Thin films, Microbolometers, Etching, Resistance, Semiconducting wafers, Scanning electron microscopy, Reflectors, Reflectivity

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Proceedings Article | 27 October 2010 Paper

Recent development in pixel level packaging for uncooled IRFPA

W. Rabaud, G. Dumont, X. Baillin, L. Carle, E. Lagoutte, M. Pellat, V. Goudon, C. Vialle, A. Arnaud

Proceedings Volume 7834, 78340T (2010) https://doi.org/10.1117/12.868462

KEYWORDS: Thin films, Etching, Packaging, Bolometers, Reflectivity, Scanning electron microscopy, Reflectors, Semiconducting wafers, Resistance, Temperature metrology

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Proceedings Article | 17 April 2008 Paper

Innovative on-chip packaging applied to uncooled IRFPA

Geoffroy Dumont, Agnès Arnaud, Pierre Impérinetti, Claire Vialle, Wilfried Rabaud, Valérie Goudon, Jean-Jacques Yon

Proceedings Volume 6940, 69401Y (2008) https://doi.org/10.1117/12.780433

KEYWORDS: Microbolometers, Packaging, Bolometers, Etching, Sensors, Absorption, Resistance, Thin films, Infrared sensors, Amorphous silicon

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Proceedings Article | 15 April 2008 Paper

Uncooled detector development for space application

W. Rabaud, M. Vilain, T. Garret, G. Hopkinson, M. Bentley, S. Kraft, O. Legras, P. Castelein

Proceedings Volume 6958, 69580P (2008) https://doi.org/10.1117/12.777993

KEYWORDS: Sensors, Microbolometers, Mercury (planet), Space operations, Readout integrated circuits, Signal to noise ratio, Planets, Infrared radiation, Thermography, Environmental sensing

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Proceedings Article | 24 January 2008 Paper

Innovative on-chip packaging applied to uncooled IRFPA

Geoffroy Dumont, Agnès Arnaud, Pierre Imperinetti, Eric Mottin, François Simoens, Claire Vialle, Wilfried Rabaud, Gilles Grand, Nathalie Baclet

Proceedings Volume 6835, 68350G (2008) https://doi.org/10.1117/12.756719

KEYWORDS: Microbolometers, Packaging, Etching, Sensors, Amorphous silicon, Absorption, Bolometers, Germanium, Zinc, Scanning electron microscopy

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Showing 5 of 15 publications

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