Dr. Wilhelm Maurer
Director Technology Layout to Mask at Infineon Technologies AG
SPIE Involvement:
Senior status | Conference Program Committee | Conference Chair | Symposium Chair | Editor | Author
Publications (41)

SPIE Conference Volume | 1 October 2013

SPIE Conference Volume | 10 May 2012

SPIE Conference Volume | 13 October 2011

SPIE Conference Volume | 24 September 2010

SPIE Conference Volume | 14 May 2010

Proceedings Article | 20 October 2006
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Lithography, Photovoltaics, Databases, Solar cells, Silicon, Design for manufacturing, Optical proximity correction, Model-based design, Process modeling, Resolution enhancement technologies

Showing 5 of 41 publications
Conference Committee Involvement (28)
30th European Mask and Lithography Conference
24 June 2014 | Dresden, Germany
Optical Microlithography XXVII
25 February 2014 | San Jose, California, United States
SPIE Photomask Technology
10 September 2013 | Monterey, California, United States
29th European Mask and Lithography Conference
25 May 2013 | Dresden, Germany
Optical Microlithography XXVI
26 February 2013 | San Jose, California, United States
Showing 5 of 28 published special sections
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