Prof. Wilhelm Seifert
at Fachhochschule Münster
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | July 22, 2003
Proc. SPIE. 5045, Testing, Reliability, and Application of Micro- and Nano-Material Systems
KEYWORDS: Microelectromechanical systems, Sensors, Polymers, Metals, Interfaces, Silicon, Silver, Resistance, Platinum, Photoresist materials

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