Will Conley
DMTS
Area of Expertise:
Photoresist , Masks , DFM , Optical Lithography , Process , OPC
Websites:
Profile Summary

Fellow Member
Publications (144)

PROCEEDINGS ARTICLE | March 20, 2018
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Lithography, Light sources, Deep ultraviolet, Scanners, Manufacturing, Semiconducting wafers, Yield improvement

PROCEEDINGS ARTICLE | March 20, 2018
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Light sources, Logic, Optical lithography, Deep ultraviolet, 3D metrology, Photomasks, Immersion lithography

PROCEEDINGS ARTICLE | March 20, 2018
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Temporal coherence, Lithography, Light sources, Metrology, Optical lithography, Etching, Line width roughness, Line edge roughness, Semiconducting wafers

PROCEEDINGS ARTICLE | August 30, 2017
Proc. SPIE. 10321, Single Frequency Semiconductor Lasers

PROCEEDINGS ARTICLE | August 30, 2017
Proc. SPIE. 10320, An Introduction to Biological and Artificial Neural Networks for Pattern Recognition

PROCEEDINGS ARTICLE | May 1, 2017
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Semiconductors, Light sources, Optical lithography, Deep ultraviolet, Modulation, Scanners, Inspection, Immersion lithography, Image contrast enhancement, Semiconducting wafers

Showing 5 of 144 publications
Conference Committee Involvement (18)
Optical Microlithography XXXII
26 February 2019 | San Jose, California, United States
SPIE Advanced Lithography
24 February 2019 | San Jose, United States
Optical Microlithography XXXI
27 February 2018 | San Jose, California, United States
SPIE Advanced Lithography
25 February 2018 | San Jose, United States
Optical Microlithography XXX
28 February 2017 | San Jose, California, United States
Showing 5 of 18 published special sections
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