William J. Arora
at Massachusetts Institute of Technology
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | April 28, 2006
Proc. SPIE. 6188, Optical Micro- and Nanometrology in Microsystems Technology
KEYWORDS: Optical components, Diffraction, Holograms, Holography, Dispersion, Photonic crystals, Geometrical optics, Optics manufacturing, Nanolithography, 3D image processing

PROCEEDINGS ARTICLE | May 16, 2005
Proc. SPIE. 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
KEYWORDS: Fabrication, Nanostructuring, Silica, Etching, Metals, Silicon, Chromium, Optical alignment, Semiconducting wafers, Nanolithography

PROCEEDINGS ARTICLE | October 18, 2004
Proc. SPIE. 5554, Photonics for Space Environments IX
KEYWORDS: Gold, Electron beam lithography, Diffraction, Nanostructuring, Silicon, Manufacturing, Kinematics, 3D modeling, Zone plates, Nanolithography

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