William J. Arora
at Massachusetts Institute of Technology
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 28 April 2006
Proc. SPIE. 6188, Optical Micro- and Nanometrology in Microsystems Technology
KEYWORDS: 3D image processing, Optical components, Nanolithography, Holograms, Photonic crystals, Dispersion, Geometrical optics, Holography, Diffraction, Optics manufacturing

Proceedings Article | 16 May 2005
Proc. SPIE. 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
KEYWORDS: Nanolithography, Silicon, Nanostructuring, Etching, Chromium, Optical alignment, Silica, Metals, Fabrication, Semiconducting wafers

Proceedings Article | 18 October 2004
Proc. SPIE. 5554, Photonics for Space Environments IX
KEYWORDS: Nanolithography, Nanostructuring, Silicon, Zone plates, Kinematics, Diffraction, Manufacturing, 3D modeling, Electron beam lithography, Gold

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