Dr. William D. Hinsberg
Owner at Columbia Hill Technical Consulting
SPIE Involvement:
Publications (58)

SPIE Journal Paper | 17 August 2022
JM3, Vol. 21, Issue 04, 041405, (August 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.4.041405
KEYWORDS: Optical lithography, Oxides, Metals, Photons, Extreme ultraviolet lithography, FT-IR spectroscopy, Extreme ultraviolet, Computer simulations, Monte Carlo methods, Absorption

SPIE Journal Paper | 2 March 2021 Open Access
William Hinsberg, Gregory Wallraff, Martha Sanchez, Nimrod Megiddo, Oleg Kostko
JM3, Vol. 20, Issue 01, 014603, (March 2021) https://doi.org/10.1117/12.10.1117/1.JMM.20.1.014603
KEYWORDS: Stochastic processes, Printing, Extreme ultraviolet, Extreme ultraviolet lithography, Photoresist materials, Photon counting, Monte Carlo methods, Chemistry, Polymers, Bridges

Proceedings Article | 26 September 2019 Paper
Proceedings Volume 11147, 1114717 (2019) https://doi.org/10.1117/12.2537632
KEYWORDS: Stochastic processes, Printing, Extreme ultraviolet, Photoresist materials, Extreme ultraviolet lithography, Polymers, Photoresist processing, Lithography, Polymer thin films, Molecules

Proceedings Article | 16 October 2017 Presentation
Oleg Kostko, Bo Xu, Daniel Slaughter, Musahid Ahmed, D. Frank Ogletree, Kristi Closser, David Prendergast, Patrick Naulleau, Deirdre Olynick, Paul Ashby, Yi Liu, William Hinsberg, Gregory Wallraff
Proceedings Volume 10450, 104500J (2017) https://doi.org/10.1117/12.2281520
KEYWORDS: Electrons, Molecules, Extreme ultraviolet, Photons, Extreme ultraviolet lithography, Photoresist materials

Proceedings Article | 27 March 2017 Paper
W. Hinsberg, S. Meyers
Proceedings Volume 10146, 1014604 (2017) https://doi.org/10.1117/12.2260265
KEYWORDS: Absorption, Extreme ultraviolet, Lithography, Polymers, Photons, Imaging systems, Metals, Oxides, Systems modeling, Extreme ultraviolet lithography

Showing 5 of 58 publications
Proceedings Volume Editor (1)

SPIE Conference Volume | 15 September 1993

Conference Committee Involvement (3)
Alternative Lithographic Technologies III
1 March 2011 | San Jose, California, United States
Alternative Lithographic Technologies II
23 February 2010 | San Jose, California, United States
Advances in Resist Technology and Processing X
1 March 1993 | San Jose, CA, United States
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